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Process Monitoring


Unique single particle optical sizing (SPOS) technology, allows users to individually size and count particles over a wide range with unprecedented accuracy AccuSizer® SPOS systems available in LE, FX, and FX-Nano configurations to meet the unique needs of your CMP slurry characteristics Nicomp® N3000 online system can be integrated into many nanoparticle processes, providing real-time particle size distributions