On –line NIR
QualiSurf® is a real-time NIR analyzer for precise monitoring of multiple-component chemistries. The QualiSurf enables users to maintain the concentrations and ratios of chemical components in wet processing solutions, preventing costly yield losses due to non-optimal chemistry. The same hardware can support numerous challenging applications by using various analytical models, such as: SC1, SC2, SPM, BOE, DHF, Silicon Nitride Etch, DSP+, ST-250, CMP slurries, KOH/IPA, HF/HNO3 and many other chemical mixtures used in the Semiconductor, FPD, LED and Solar industries. The analyzer provides instantaneous results which can be transmitted via closed-loop feedback to any single wafer or batch type cleaning tool, to maintain consistent concentrations and etch rates.