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Linear Motion and Alignment

Linear Shift Mechanisms (LSMs) provide linear motion along the port axis (Z). Typical applications include the positioning of beamline filters, adjustment of sputter sources and deposition stages through to production style applications. UHV Design has the largest range of LSMs in the world, ranging from CF35 to CF150 flanges, up to 1m stroke, tilt & X alignment versions with manual, pneumatic and motorisation options, all available with a range of position encoders. Bakeable to 250°C, the range is supplied on CF flanges and provides true UHV performance. The bellows-sealed LSMs provide smooth, precise motion via a kinematically-designed external leadscrew driven mechanism, complete with anti-rotation and anti-deflection systems.